The Use of X-ray Microanalysis in the Study of Diffusion

This paper reviews the use of electron probe microanalysis, scanning electron microscopy and analytical electron microscopy in the measurement of compositional data obtained from diffusion couples. Methods to obtain x—ray spatial resolution as low as mm with the AEM are described. In addition, techniques for improving the detection and for increasing the accuracy of compositional analyses are summarized. Sample preparation techniques for AEM are also discussed. Examples of the use of the above methods for materials problems such as Cu—Sn—Pb—Au solders, Ni—Cr—Al coatings, N diffusion in Fe and Ni—Nb diffusion couples are given.